Production Of Antireflective Coatings By Ion Implantation

Paolo Mazzoldi

doi:10.1117/12.935484

18 September 1983 Production Of Antireflective Coatings By Ion Implantation

Paolo Mazzoldi

Author Affiliations +

Proceedings Volume 0400, New Optical Materials; (1983) https://doi.org/10.1117/12.935484
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

In this paper a systematic investigation on the optical behaviour of 40-100 keV Ar implant ed alkali glasses will be discussed. The implantation of soda-lime glasses resulted in a surface layer formation which presents a decreased refractive index. The thickness and average refractive index of such layer have been evaluated from the position and height of the interferential minima, observed in the reflectance curves. The significative antireflective improvement of the implanted glass has been connected to a surface alkali depletion, due to a preferential sputtering and an enhanced diffusion over the implanted ion range.

Citation Download Citation

Paolo Mazzoldi "Production Of Antireflective Coatings By Ion Implantation", Proc. SPIE 0400, New Optical Materials, (18 September 1983); https://doi.org/10.1117/12.935484

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