5 July 2000 Optical holography used in optical microlithography
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Abstract
A ne optical microlithography - optical holographic microlithography is described in the paper. The primary principle, hologram repositioning, main advantages, basic applications and some experimental system aspects of the optical holographic microlithography are also described.
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Boru Feng, Boru Feng, Jin Zhang, Jin Zhang, Desheng Hou, Desheng Hou, Fen Chen, Fen Chen, } "Optical holography used in optical microlithography", Proc. SPIE 4000, Optical Microlithography XIII, (5 July 2000); doi: 10.1117/12.389082; https://doi.org/10.1117/12.389082
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