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5 July 2000 Optical holography used in optical microlithography
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Abstract
A ne optical microlithography - optical holographic microlithography is described in the paper. The primary principle, hologram repositioning, main advantages, basic applications and some experimental system aspects of the optical holographic microlithography are also described.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Boru Feng, Jin Zhang, Desheng Hou, and Fen Chen "Optical holography used in optical microlithography", Proc. SPIE 4000, Optical Microlithography XIII, (5 July 2000); https://doi.org/10.1117/12.389082
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