Recent advances in laser micromachining

William A. Beck

doi:10.1117/12.380098

20 March 2000 Recent advances in laser micromachining

William A. Beck

Proceedings Volume 4002, Saratov Fall Meeting '99: Laser Physics and Spectroscopy; (2000) https://doi.org/10.1117/12.380098
Event: Saratov Fall Meeting '99, 1999, Saratov, Russian Federation

Abstract

Laser micro-machining offers the ability to cut more complex patterns with less damage to delicate materials than competing approaches. Here we review recent progress in laser micromachining of piezoelectrically active PZTs, ferroelectric single crystal perovskites, and laser applications to high density electrical interconnect problems; the methods discussed here have broad application to the development of devices down to the MEMS scale.

Citation Download Citation

William A. Beck "Recent advances in laser micromachining", Proc. SPIE 4002, Saratov Fall Meeting '99: Laser Physics and Spectroscopy, (20 March 2000); https://doi.org/10.1117/12.380098

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