20 July 2000 Measuring large aspherics using a commercially available 3D-coordinate measuring machine
Author Affiliations +
Abstract
A CNC-controlled precision measuring machine is a very powerful tool in the optical shop not only to determine the surface figure, but also to qualify the radius of curvature and conic constant of aspherics. We used a commercially available 3D-coordinate measuring machine (CMM, ZEISS UPMC 850 CARAT S-ACC) to measure the shape of the GEMINI 1-m convex secondary mirrors at different lapping and polishing stages. To determine the measuring accuracy we compared the mechanical measurements with the results achieved by means of an interferometrical test setup. The data obtained in an early stage of polishing were evaluated in Zernike polynomials which show a very good agreement. The deviation concerning long wave rotational symmetrical errors was 20 nm rms, whereas the accuracy measuring of mid spatial frequency deviations was limited to about 100 nm rms.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wolfgang Otto, Axel Matthes, Heinz Schiehle, "Measuring large aspherics using a commercially available 3D-coordinate measuring machine", Proc. SPIE 4003, Optical Design, Materials, Fabrication, and Maintenance, (20 July 2000); doi: 10.1117/12.391498; https://doi.org/10.1117/12.391498
PROCEEDINGS
7 PAGES


SHARE
RELATED CONTENT

Technologies In Aspherisation
Proceedings of SPIE (January 16 1989)
NOAO testing procedures for large optics
Proceedings of SPIE (March 26 1992)
Testing of the Gemini secondary mirrors
Proceedings of SPIE (September 06 1999)

Back to Top