20 July 2000 Measuring large aspherics using a commercially available 3D-coordinate measuring machine
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A CNC-controlled precision measuring machine is a very powerful tool in the optical shop not only to determine the surface figure, but also to qualify the radius of curvature and conic constant of aspherics. We used a commercially available 3D-coordinate measuring machine (CMM, ZEISS UPMC 850 CARAT S-ACC) to measure the shape of the GEMINI 1-m convex secondary mirrors at different lapping and polishing stages. To determine the measuring accuracy we compared the mechanical measurements with the results achieved by means of an interferometrical test setup. The data obtained in an early stage of polishing were evaluated in Zernike polynomials which show a very good agreement. The deviation concerning long wave rotational symmetrical errors was 20 nm rms, whereas the accuracy measuring of mid spatial frequency deviations was limited to about 100 nm rms.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wolfgang Otto, Wolfgang Otto, Axel Matthes, Axel Matthes, Heinz Schiehle, Heinz Schiehle, } "Measuring large aspherics using a commercially available 3D-coordinate measuring machine", Proc. SPIE 4003, Optical Design, Materials, Fabrication, and Maintenance, (20 July 2000); doi: 10.1117/12.391498; https://doi.org/10.1117/12.391498


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