7 July 2000 Low-cost membrane-type deformable mirror with high-density actuator spacing
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A design for a Deformable Mirror (DM) with closely spaced actuators is presented. The DM surface is made of a thin membrane type glass with a thickness of 300 microns. It is supported by a series of piezoelectric actuator tubes with a square grid spacing of 4 mm. A conventional epoxy bond is used to hold the actuators to the membrane, with a small steel ball interfacing between the two (at each actuator) for desirable deformation characteristics. The actuators are also bonded to a base structure made of commercially pure Titanium to help athermalize the overall design. The base structure is designed to protect the epoxy bonds from atmospheric moisture. With this design, an actuator could be capable of up to 7 microns of displacement with respect to neighboring actuators, allowing for considerable ability to correct wavefront error in a compact design. Such capability is required to achieve the goals of adaptive coronagraph systems on large, ground based telescopes. Low cost is achieved through the use of inexpensive actuators and a relatively simple fabrication process.
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Robert S. Winsor, Robert S. Winsor, Anand Sivaramakrishnan, Anand Sivaramakrishnan, Russell B. Makidon, Russell B. Makidon, } "Low-cost membrane-type deformable mirror with high-density actuator spacing", Proc. SPIE 4007, Adaptive Optical Systems Technology, (7 July 2000); doi: 10.1117/12.390305; https://doi.org/10.1117/12.390305

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