Preparation Of Planar Optical SiO[sub]2[/sub]-TiO[sub]2[/sub] And LiNbO[sub]3[/sub] Waveguides With A Dip Coating Method And An Embossing Technique For Fabricating Grating Couplers And Channel Waveguides

K. Tiefenthaler; V. Briguet; E. Buser; M. Horisberger; W. Lukosz

doi:10.1117/12.935515

28 November 1983 Preparation Of Planar Optical SiO₂-TiO₂ And LiNbO₃ Waveguides With A Dip Coating Method And An Embossing Technique For Fabricating Grating Couplers And Channel Waveguides

K. Tiefenthaler, V. Briguet, E. Buser, M. Horisberger, W. Lukosz

Author Affiliations +

Proceedings Volume 0401, Thin Film Technologies I; (1983) https://doi.org/10.1117/12.935515
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

Planar monomode and multimode Si0₂-Ti0² waveguides were prepared with a dip coating method from Liquicoat solutions supplied by E. MERCK. By varying the Si0₂:Ti0₂ mixture ratio the value of the refractive index nF of the waveguiding films on Pyrex glass substrates can be chosen to lie between nF-1.6 and n_F =1.36 First results on the preparation of LiNb0₃ waveguides are also presented. Thicknesses, refractive indices and losses of the waveguides were determined at the blue-green Ar laser wavelengths and at the He-Ne laser wavelengths λ=632.8 nm and λ=1.153 μm. With an embossing technique we fabricated surface relief gratings on Si0₂-Ti0₂ wave-guides. We used them successfully as input grating couplers. We propose to use this emboss-ing technique to fabricate channel waveguides and other integrated optical components in inorganic hard waveguiding materials such as Si0₂-Ti0₂.

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K. Tiefenthaler, V. Briguet, E. Buser, M. Horisberger, and W. Lukosz "Preparation Of Planar Optical SiO₂-TiO₂ And LiNbO₃ Waveguides With A Dip Coating Method And An Embossing Technique For Fabricating Grating Couplers And Channel Waveguides", Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); https://doi.org/10.1117/12.935515

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