18- to 20-nm broadband multilayer at normal incidence

Changjun Ke; Zhansan Wang; Y. Z. Ma; Jianlin Cao; Xingdan Chen

doi:10.1117/12.391570

18 July 2000 18- to 20-nm broadband multilayer at normal incidence

Changjun Ke, Zhansan Wang, Y. Z. Ma, Jianlin Cao, Xingdan Chen

Author Affiliations +

Proceedings Volume 4012, X-Ray Optics, Instruments, and Missions III; (2000) https://doi.org/10.1117/12.391570
Event: Astronomical Telescopes and Instrumentation, 2000, Munich, Germany

Abstract

A better random method used for improving light throughput of a soft X-ray multilayer has been developed in the 18 - 20 nm spectral region, it bases on the traditional theory of periodic multilayer, a 8% gain in integrated reflectance is obtained. We present ensemble calculation at the same time, and the multilayer is fabricated by magnetron sputtering. Finally low-angle X-ray diffraction and reflectance comparative measurement are used for testing the multilayer. The results demonstrate that layer thickness disorder yields band broadening (for both wavelength and angle) and increased integrated reflectance in the spectral range with respect to periodic multilayer, but accompanied with a reduction in reflectance peak. Layer thickness disorder makes it more difficult to fabricate broadband multilayer, raising the techniques of control layer thickness is the keystone of experiments.

Citation Download Citation

Changjun Ke, Zhansan Wang, Y. Z. Ma, Jianlin Cao, and Xingdan Chen "18- to 20-nm broadband multilayer at normal incidence", Proc. SPIE 4012, X-Ray Optics, Instruments, and Missions III, (18 July 2000); https://doi.org/10.1117/12.391570

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