Measurement of submicron laser beam profiles using nanoprobes

Petr Jakl; Alexandr Jonas; Josef Lazar; Ondrej Cip; Zdenek Harna; Miroslav Liska; Pavel Tomanek; Pavel Zemanek

doi:10.1117/12.373644

29 December 1999 Measurement of submicron laser beam profiles using nanoprobes

Petr Jakl, Alexandr Jonas, Josef Lazar, Ondrej Cip, Zdenek Harna, Miroslav Liska, Pavel Tomanek, Pavel Zemanek

Proceedings Volume 4016, Photonics, Devices, and Systems; (1999) https://doi.org/10.1117/12.373644
Event: Photonics Prague '99, 1999, Prague, Czech Republic

Abstract

An experimental method for the measurement of the profile of the laser beam focused by a high NA lens is presented. A homemade PZT driven stage is used to scan a near-field optical microscope probe through the beam profile. The probe position is detected via strain gauges which were calibrated by laser interferometer and the intensity collected by the probe is measured by photomultiplier. The stage positioning accuracy +/- 50 nm enables the measurement of the intensity distributions within submicron-sized beam spots. As an example, intensity profiles of a TEM₀₀ laser beam focused by a water immersion objective are presented.

Citation Download Citation

Petr Jakl, Alexandr Jonas, Josef Lazar, Ondrej Cip, Zdenek Harna, Miroslav Liska, Pavel Tomanek, and Pavel Zemanek "Measurement of submicron laser beam profiles using nanoprobes", Proc. SPIE 4016, Photonics, Devices, and Systems, (29 December 1999); https://doi.org/10.1117/12.373644

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