29 December 1999 Measurement of submicron laser beam profiles using nanoprobes
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Proceedings Volume 4016, Photonics, Devices, and Systems; (1999) https://doi.org/10.1117/12.373644
Event: Photonics Prague '99, 1999, Prague, Czech Republic
An experimental method for the measurement of the profile of the laser beam focused by a high NA lens is presented. A homemade PZT driven stage is used to scan a near-field optical microscope probe through the beam profile. The probe position is detected via strain gauges which were calibrated by laser interferometer and the intensity collected by the probe is measured by photomultiplier. The stage positioning accuracy +/- 50 nm enables the measurement of the intensity distributions within submicron-sized beam spots. As an example, intensity profiles of a TEM00 laser beam focused by a water immersion objective are presented.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Petr Jakl, Petr Jakl, Alexandr Jonas, Alexandr Jonas, Josef Lazar, Josef Lazar, Ondrej Cip, Ondrej Cip, Zdenek Harna, Zdenek Harna, Miroslav Liska, Miroslav Liska, Pavel Tomanek, Pavel Tomanek, Pavel Zemanek, Pavel Zemanek, } "Measurement of submicron laser beam profiles using nanoprobes", Proc. SPIE 4016, Photonics, Devices, and Systems, (29 December 1999); doi: 10.1117/12.373644; https://doi.org/10.1117/12.373644

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