13 December 1999 Interference profilometry flutes with abrupt slopes in metal
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Proceedings Volume 4018, Optoelectronic Metrology; (1999) https://doi.org/10.1117/12.373737
Event: Optoelectronic Metrology, 1998, Lancut, Poland
In this article the determination of a strict diffraction problem on 1D metal phase flutes is investigated, in application to a method of interference measurement with the help of laser profilometer.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark L. Gourari, Mark L. Gourari, Anatolyi A. Liberman, Anatolyi A. Liberman, } "Interference profilometry flutes with abrupt slopes in metal", Proc. SPIE 4018, Optoelectronic Metrology, (13 December 1999); doi: 10.1117/12.373737; https://doi.org/10.1117/12.373737

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