13 December 1999 Interference profilometry flutes with abrupt slopes in metal
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Proceedings Volume 4018, Optoelectronic Metrology; (1999) https://doi.org/10.1117/12.373737
Event: Optoelectronic Metrology, 1998, Lancut, Poland
In this article the determination of a strict diffraction problem on 1D metal phase flutes is investigated, in application to a method of interference measurement with the help of laser profilometer.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark L. Gourari, Mark L. Gourari, Anatolyi A. Liberman, Anatolyi A. Liberman, "Interference profilometry flutes with abrupt slopes in metal", Proc. SPIE 4018, Optoelectronic Metrology, (13 December 1999); doi: 10.1117/12.373737; https://doi.org/10.1117/12.373737

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