1-GHz CMOS VCO design for wireless application using MEMS technology

Amal Mohamed; Hamed Elsimary; Mohammed Ismail

doi:10.1117/12.382284

10 April 2000 1-GHz CMOS VCO design for wireless application using MEMS technology

Amal Mohamed, Hamed Elsimary, Mohammed Ismail

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382284
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

In this work, the design of RF VCO circuit, in which the oscillation frequency is controlled by a tunable capacitor based on microelectromechanical system (MEMS) technology is presented. The design of high Q-MEMS tunable capacitor has been accomplished through bulk micro machining with all metal micro structure. A standard CMOS process is used to carry out the fabrication of the VCO circuit with the MEMS tunable capacitor on the same chip. The main features of this design, is the enabling of a complete monolithic fabrication RF VCOs using on-chip IC compatible high-Q MEMS tunable capacitor. The performance of the MEMS capacitor is modeled with emphasis on the tunability range with the tuning voltage. The simulation results are presented to show the performance of RF VCO circuit with the MEMS tunable capacitor, which has a high-Q of about 60 at 1 GHZ and low insertion loss of -1dB at 40 GHz.

Citation Download Citation

Amal Mohamed, Hamed Elsimary, and Mohammed Ismail "1-GHz CMOS VCO design for wireless application using MEMS technology", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382284

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