10 April 2000 CFD-Micromesh: a fast geometric modeling and mesh generation tool for 3D microsystem simulations
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Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382289
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France
Abstract
In this work, a new fully automated geometrical modeling and meshing tool is described. It imports standard layout formats, images, and 3D boundary representations s. A 3D model is then generated by simulating 3D operations specified by the process data or the user. A 3D finite element mesh with tagged boundary and volume conditions is then automatically created. The automatic generation of 3D model and mesh takes typically a couple of minutes on a current PC machine. The paper will present the geometry/meshing engines, user interfaces, and will demonstrate them on a range of microsystem applications.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhiqiang Tan, Zhiqiang Tan, M. Furmanczyk, M. Furmanczyk, Marek Turowski, Marek Turowski, Andrzej J. Przekwas, Andrzej J. Przekwas, "CFD-Micromesh: a fast geometric modeling and mesh generation tool for 3D microsystem simulations", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382289; https://doi.org/10.1117/12.382289
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