Efficient reduced order modeling for system simulation of micro-electro-mechanical systems (MEMS) from FEM models

Bachar Affour; Philippe Nachtergaele; Stevan Spirkovitch; Dale Ostergaard; Miklos P. Gyimesi

doi:10.1117/12.382297

10 April 2000 Efficient reduced order modeling for system simulation of micro-electro-mechanical systems (MEMS) from FEM models

Bachar Affour, Philippe Nachtergaele, Stevan Spirkovitch, Dale Ostergaard, Miklos P. Gyimesi

Author Affiliations +

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382297
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

System designers need access to high-fidelity behavioral models in order to simulate system of MEMS, electronics and packaging. Therefore, the need exists to create behavioral models that provide accurate harmonic and time-domain solutions in a fast and efficient manner. In the MEMSCAP MEMS design suite, the EDD family of tools enables the generation of non-linear dynamic behavioral models from models with a hierarchically lower level of abstraction or measured data. In this paper, we report on a new module of EDD, the ANSYS ModelBuilder, which is embedded in the ANSYS Multi-physics tool set. The module reduces the dimensionality of FEM models built in ANSYS and writes them in popular modeling languages such as HDL-A, SPICE, VHDL-AMS and Verilog-A. We illustrate the capabilities of our new tool by utilizing it to develop two system level examples and compare the results to the full 3D descriptions.

Citation Download Citation

Bachar Affour, Philippe Nachtergaele, Stevan Spirkovitch, Dale Ostergaard, and Miklos P. Gyimesi "Efficient reduced order modeling for system simulation of micro-electro-mechanical systems (MEMS) from FEM models", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382297

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available