10 April 2000 Electromagnetic analysis of the IR sensor focal plane arrays of micro-optics
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Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382276
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France
Abstract
Matrices of binary micro-lenses monolithically integrated with the focal-place-arrays (FPA) of longwave IR uncooled detectors can significantly improve sensor's parameters. Surface relief of the binary micro-lenses is built of annular stair step structures of heights and widths smaller than the radiation length. Scalar diffraction theory cannot correctly describe diffraction on these micro-structures and therefore the rigorous electromagnetic theory should be applied. In this aper, we have applied the electromagnetic eignemode method to study binary micro-optics for the longwave IR FPA of 50 micrometers pixel width. We have shown that binary refractive micro-lenses outperform their diffractive counterparts allowing for detectors of 10 micrometers width. The effective refractive micro-lenses require the 8-level surface relief. Geometrical optics predictions of the focal position agree quite well width electromagnetic calculations.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zbigniew Sikorski, Zbigniew Sikorski, } "Electromagnetic analysis of the IR sensor focal plane arrays of micro-optics", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382276; https://doi.org/10.1117/12.382276
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