MEMS IC test probe utilizing fritting contacts

Toshihiro Itoh; Kenichi Kataoka; Gunter Engelmann; Juergen Wolf; Oswin Ehrmann; Herbert Reichl; Tadatomo Suga

doi:10.1117/12.382300

10 April 2000 MEMS IC test probe utilizing fritting contacts

Toshihiro Itoh, Kenichi Kataoka, Gunter Engelmann, Juergen Wolf, Oswin Ehrmann, Herbert Reichl, Tadatomo Suga

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382300
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

The emerging MEMS technologies are entering in an active phase of high volume production and successful commercial applications. The expertise and the qualification for space application of such devices have already begun. But these technologies are still recent and important efforts on the reliability issue have to be done. This paper defines the role of technological analysis in the actual MEMS design process. Afterwards, it presents MEMS technological analysis techniques developed at CNES applied to an open MEMS technology. In particular, it is shown how these technological analyses response to designer needs and that the designer and the founder still need a strong interaction. We also present the MEMS reliability issue at CNES and replace it in the current world's one.

Citation Download Citation

Toshihiro Itoh, Kenichi Kataoka, Gunter Engelmann, Juergen Wolf, Oswin Ehrmann, Herbert Reichl, and Tadatomo Suga "MEMS IC test probe utilizing fritting contacts", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382300

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