10 April 2000 Microactuated optical MEMS (Abstract Only)
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Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382261
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France
Optical scanners and switches are presented as examples of microactuated optical devices. Also a 3D chip-level packaging technique that is capable of optical, mechanical and electronic connections is discussed.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hiroyuki Fujita, Hiroyuki Fujita, } "Microactuated optical MEMS (Abstract Only)", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382261; https://doi.org/10.1117/12.382261


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