Micromachined CMOS magnetic field sensor with ferromagnetic actuation

Laurent Latorre; V. Beroulle; Y. Bertrand; Pascal Nouet; I. Salesse

doi:10.1117/12.382280

10 April 2000 Micromachined CMOS magnetic field sensor with ferromagnetic actuation

Laurent Latorre, V. Beroulle, Y. Bertrand, Pascal Nouet, I. Salesse

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382280
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

In this paper we intend to introduce a new magnetic field sensor. The sensing principle is based on the deformation of a mechanical structure due to magnetic forces, using ferromagnetic materials. Thus the sensor can be classified in the passive sensor category and exhibits very low power consumption, only due to conditioning circuit. The sensor is designed for monolithic integration with CMOS electronics. Post-process fabrication steps are described and experimental results, obtained on a torsion structure are shown. The sensitivity of this new sensor compares with that of highly sensitive Hall plates. A simple analytical model is finally given and turned into analog VHDL description in order to fully integrate the sensor in the standard microelectronic design flow.

Citation Download Citation

Laurent Latorre, V. Beroulle, Y. Bertrand, Pascal Nouet, and I. Salesse "Micromachined CMOS magnetic field sensor with ferromagnetic actuation", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382280

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