Microsystems reliability estimation features

A. Andonova; Ch. Roumenin

doi:10.1117/12.382317

10 April 2000 Microsystems reliability estimation features

A. Andonova, Ch. Roumenin

Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382317
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France

Abstract

A new approach for a practical, easy to implement reliability estimation procedure for microsystems (MS) is presented. The proposed procedure is based on the combined use of a number of reliability data sources, deterministic models and calculation methods for MS components. Some criteria needed to assess the value of a reliability prediction procedure are established. For the first time these criteria are chosen to specific features of MS subfunctions and components. To be obtained realistic test data for all MS component a qualification for them are designed.

Citation Download Citation

A. Andonova and Ch. Roumenin "Microsystems reliability estimation features", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); https://doi.org/10.1117/12.382317

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