10 April 2000 Numerical spring models for behavioral simulation of MEMS inertial sensors
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Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382307
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France
Abstract
Design of springs is a very important step in the design process of inertial sensor. A procedure for computing the sprint stiffness for any single-chain configuration of beams and a translator which converts beam-based schematic representation of inertial sensor to higher-level behavioral representation are implemented. Combining the spring stiffness computation with the translator, sprint-mass behavioral models of inertial sensor are generated. The behavioral representation is used for rapid design-space exploration. Simulations of the higher-level behavioral representation is used for rapid design-space exploration. Simulations of the higher-level behavioral schematics are 10 to 100 times faster than simulation of the atomic-elements based schematics and the result match to within 5 percent.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sitaraman V. Iyer, Tamal Mukherjee, "Numerical spring models for behavioral simulation of MEMS inertial sensors", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382307; https://doi.org/10.1117/12.382307
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