10 April 2000 Numerical spring models for behavioral simulation of MEMS inertial sensors
Author Affiliations +
Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382307
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France
Abstract
Design of springs is a very important step in the design process of inertial sensor. A procedure for computing the sprint stiffness for any single-chain configuration of beams and a translator which converts beam-based schematic representation of inertial sensor to higher-level behavioral representation are implemented. Combining the spring stiffness computation with the translator, sprint-mass behavioral models of inertial sensor are generated. The behavioral representation is used for rapid design-space exploration. Simulations of the higher-level behavioral representation is used for rapid design-space exploration. Simulations of the higher-level behavioral schematics are 10 to 100 times faster than simulation of the atomic-elements based schematics and the result match to within 5 percent.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sitaraman V. Iyer, Sitaraman V. Iyer, Tamal Mukherjee, Tamal Mukherjee, } "Numerical spring models for behavioral simulation of MEMS inertial sensors", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382307; https://doi.org/10.1117/12.382307
PROCEEDINGS
8 PAGES


SHARE
Back to Top