10 April 2000 Rapid fabrication of microcomponents
Author Affiliations +
Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382295
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France
In the macroscopic world different 'rapid'-technologies like Rapid Prototyping, Rapid Manufacturing or Rapid Tooling have been established for a fast prototype or molding tool development. In all cases CAD-data can be transformed in a model or prototype directly using a laser which polymerizes reactive resin layer by layer to a final 3D mold within a short period. In this work the rapid fabrication of micro components made from polymers or composites will be presented. The whole fabrication process is divided into two main steps: Firstly laser assisted micro machining using Nd:YAG and KrF-Excimer laser allows a rapid manufacturing of micro structured cemented carbide or steel mold inserts. Secondly the application of light induced reaction injection molding using reactive monomer/polymer resins gives access to the replication of the previously fabricated mold insert. The total processing period starting from CAD until the modeled micro structured part is less than one week.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas Hanemann, Thomas Hanemann, Juergen H. Hausselt, Juergen H. Hausselt, Robert Ruprecht, Robert Ruprecht, M. Skrifvars, M. Skrifvars, K.-H. Zum Gahr, K.-H. Zum Gahr, Wilhelm Pfleging, Wilhelm Pfleging, } "Rapid fabrication of microcomponents", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382295; https://doi.org/10.1117/12.382295

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