10 April 2000 Standardization for microsystem technology
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Proceedings Volume 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS; (2000) https://doi.org/10.1117/12.382292
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, Paris, France
Abstract
This article sets out to first recall some of the major principles of standardization and to identify the main areas of MST where standards would be beneficial. It then sets out to identify the main organizations presently involved in standardization activities.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Werner Brenner, Werner Brenner, A. Stelmach, A. Stelmach, J. Baret, J. Baret, } "Standardization for microsystem technology", Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382292; https://doi.org/10.1117/12.382292
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