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17 July 2000 Ambient temperature IR focal plane arrays
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Abstract
The advent of modern photolithography and micromachining techniques has led to the development of many kinds of infrared sensitive focal plane arrays. This paper outlines the history of the development of modern uncooled thermal detector arrays, considerations for reading out those arrays, scaling laws for array design parameters, and ways to improve sensitivity and dynamic range. Future arrays will have smaller pitch (15 micrometer), higher sensitivity (10 - 20 mK, F/1), wider dynamic range (> 100 degrees Celsius, 10,000:1), and better resolution (1280 X 1024). These improvements will come about with better photolithographic resolution, thinner structures, and reduced noise.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Neal R. Butler "Ambient temperature IR focal plane arrays", Proc. SPIE 4028, Infrared Detectors and Focal Plane Arrays VI, (17 July 2000); https://doi.org/10.1117/12.391718
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