InSb focal plane array (FPAs) grown by molecular beam epitaxy (MBE)

Tim Ashley; Ian M. Baker; Theresa M. Burke; David T. Dutton; John A. Haigh; Leslie G. Hipwood; Richard Jefferies; Alan David Johnson; Peter Knowles; J. Chris Little

doi:10.1117/12.391753

17 July 2000 InSb focal plane array (FPAs) grown by molecular beam epitaxy (MBE)

Tim Ashley, Ian M. Baker, Theresa M. Burke, David T. Dutton, John A. Haigh, Leslie G. Hipwood, Richard Jefferies, Alan David Johnson, Peter Knowles, J. Chris Little

Author Affiliations +

Proceedings Volume 4028, Infrared Detectors and Focal Plane Arrays VI; (2000) https://doi.org/10.1117/12.391753
Event: AeroSense 2000, 2000, Orlando, FL, United States

Abstract

Staring InSb FPAs grown by MBE have been demonstrated. Low growth temperatures have been employed to provide p⁺-n- n⁺ photodiodes with a dark, 80 K R_OA equals 9 X 10⁵(Omega) cm². A degenerately doped substrate has been used to provide transparency in the 3.5 micrometer - 5.5 micrometer spectral region. Free carrier absorption necessitates some thinning of the substrate and an anti- reflection coated external quantum efficiency of 62% has been achieved with a final thickness of approximately equals 40 micrometer. 320 X 256 FPA's operating at 90 K and looking at a 295 K scene in f/2 have a noise equivalent temperature (NE(Delta) T) at half well of 10.4 mK. FPA operability exceeds 99.7%.

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Tim Ashley, Ian M. Baker, Theresa M. Burke, David T. Dutton, John A. Haigh, Leslie G. Hipwood, Richard Jefferies, Alan David Johnson, Peter Knowles, and J. Chris Little "InSb focal plane array (FPAs) grown by molecular beam epitaxy (MBE)", Proc. SPIE 4028, Infrared Detectors and Focal Plane Arrays VI, (17 July 2000); https://doi.org/10.1117/12.391753

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