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17 July 2000 Miniature VO2-based bolometric detectors for high-resolution uncooled FPAs
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Abstract
Prototypes of VO2-based bolometric detectors with lateral dimensions of 25 X 25, 30 X 30, 35 X 35, 40 X 40 and finally 50 X 50 micrometers2 and fill factors approaching 90% are presented. These detectors are grouped in hardwired linear arrays as large as 512 X 1 pixels. Under DC biasing, the fabricated detectors, even the smallest ones, exhibit responsivities from 48,000 to 120,000 VW-1, detectivities in the range of 1.5 X 108 cm Hz1/2W-1 and response times in the range of 5 ms. These new bolometric detector structures contain hidden-legs placed completely underneath the bolometer platform. Results of simulations of the mechanical, optical and electrical properties of these new detector structures are presented. A complete detector fabrication process flow is described.
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Hubert Jerominek, Timothy D. Pope, Christine Alain, Rose Zhang, Francis Picard, Mario Lehoux, Felix Cayer, Simon Savard, Carl Larouche, and Carol Grenier "Miniature VO2-based bolometric detectors for high-resolution uncooled FPAs", Proc. SPIE 4028, Infrared Detectors and Focal Plane Arrays VI, (17 July 2000); https://doi.org/10.1117/12.391766
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