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16 August 2000 Laser ablation of organic materials: hydrodynamic model
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Proceedings Volume 4065, High-Power Laser Ablation III; (2000) https://doi.org/10.1117/12.407323
Event: High-Power Laser Ablation, 2000, Santa Fe, NM, United States
Abstract
The applicability of hydrodynamic models for theoretical description of UV laser ablation of polymers is studied. The plume formation is considered as a first-kind phase transition. In case of strongly absorbing polymers this phase transition occurs as a surface evaporation, and in case of weakly absorbing polymers as a bulk evaporation. The vapor plume is assumed to be transparent for laser radiation, and its expansion is described by the isoentropic hydrodynamic equations. New analytical expressions for ablation (etch) depths per pulse are obtained, which are in a good agreement with the available experimental data.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Irina N. Zavestovskaia, Yuri V. Afanasiev, Boris N. Chichkov, and Vladimir A. Isakov "Laser ablation of organic materials: hydrodynamic model", Proc. SPIE 4065, High-Power Laser Ablation III, (16 August 2000); https://doi.org/10.1117/12.407323
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