23 February 2000 High-precision towers for support of an optoelectronic detector
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Proceedings Volume 4068, SIOEL '99: Sixth Symposium on Optoelectronics; (2000) https://doi.org/10.1117/12.378665
Event: SIOEL: Sixth Symposium of Optoelectronics, 1999, Bucharest, Romania
Abstract
This paper describes the construction of high precision towers for support of an optoelectronical detect during fabrication. For fabrication of an optoelectronical detector is necessary a special room with a special environment. After assembling the frame of detector must be in plane, in range of +/- 10 micrometers .
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Brindus Comanescu, Adelina Ighigeanu, Daniel Oancea, Mihai Petcu, Bogdan Tatulea, Gueorgui Chelkov, Dmitri Dedovich, Petr Evtoukhovitch, Alexi Gongadze, Serguei Podkladkin, Edisher Tskhadadze, "High-precision towers for support of an optoelectronic detector", Proc. SPIE 4068, SIOEL '99: Sixth Symposium on Optoelectronics, (23 February 2000); doi: 10.1117/12.378665; https://doi.org/10.1117/12.378665
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