Improved measurement precision through continuous optical focusing on optoelectronic detection devices

Catalin A. Spulber; Gabriel E. Constantinescu

doi:10.1117/12.378690

23 February 2000 Improved measurement precision through continuous optical focusing on optoelectronic detection devices

Catalin A. Spulber, Gabriel E. Constantinescu

Proceedings Volume 4068, SIOEL '99: Sixth Symposium on Optoelectronics; (2000) https://doi.org/10.1117/12.378690
Event: SIOEL: Sixth Symposium of Optoelectronics, 1999, Bucharest, Romania

Abstract

This paper reports on minimizing measurement errors that are characteristic of small distances of the object plane through continuous focusing of optical system that concentrate radiation on a typical opto-electronic detection device. One such system is the catoptric objective that uses a focusing system based on the movement of a mobile element inside the objective. Our results show that decreasing the distance between the mobile and fixed element leads to an increase of the focal distance and consequently of the object plane distance. The measurement precision increases with optical amplification, and hence, we studied the way optical amplification, and hence, we studied the way optical amplification changes with a continuous focusing, in two different situations: the detection device is calibrated at the maximum distance and the detection device is calibrated at the minimum distance. Finally, we present different examples of variation of measurement precision for discrete values of properties of some objectives. In order to minimize image-focusing errors for the extreme distances, aberrations optimization of the optical systems for an intermediate position of the object plane was factored in.

Citation Download Citation

Catalin A. Spulber and Gabriel E. Constantinescu "Improved measurement precision through continuous optical focusing on optoelectronic detection devices", Proc. SPIE 4068, SIOEL '99: Sixth Symposium on Optoelectronics, (23 February 2000); https://doi.org/10.1117/12.378690

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