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23 February 2000 Plume behavior and thin film deposition by laser ablation using a hellicoidal shadow mask
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Proceedings Volume 4068, SIOEL '99: Sixth Symposium on Optoelectronics; (2000) https://doi.org/10.1117/12.378728
Event: SIOEL: Sixth Symposium of Optoelectronics, 1999, Bucharest, Romania
Abstract
The laser ablation is one of the best ways to obtain smooth thin film deposited on various substrates. However, to obtain a 'droplets-free' surface some special experimental setups are necessary.ONe of them is the 'eclipse' method, using a plane shadow mask. Based on studies on the plume behavior in a 'standard' deposition and in a plane shadow mask eclipse deposition, we prose a new shadow mask having a an helicoidal shape, which permit to obtain a abetter film quality - maximum droplets size about 10 times smaller than for the plane shadow mask. The plume behavior and thin film quality are presented and discussed.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Aurelian Marcu, Constantin Grigoriu, W. Jang, and Kiyoshi Yatsui "Plume behavior and thin film deposition by laser ablation using a hellicoidal shadow mask", Proc. SPIE 4068, SIOEL '99: Sixth Symposium on Optoelectronics, (23 February 2000); https://doi.org/10.1117/12.378728
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