Paper
25 February 2000 Excimer laser ablation of borocarbide targets
Salvatore Amoruso, Mario Armenante, Riccardo Bruzzese, M. Iavarone, Nicola Spinelli, R. Vaglio, Raffaele Velotta, X. Wang
Author Affiliations +
Proceedings Volume 4070, ALT '99 International Conference on Advanced Laser Technologies; (2000) https://doi.org/10.1117/12.378161
Event: ALT'99 International Conference: Advanced Laser Technologies, 1999, Potenza-Lecce, Italy
Abstract
We report on the investigation of XeF excimer laser ablation of YNi2B2C target by energy selective time-of-flight mass spectrometry (ES-TOFMS). ES-TOFMS allows laser plume investigation by providing a direct measurement of the ions kinetic energy and, through the TOF measurement, their simultaneous mass identification. In particular, the composition and the kinetic energy of the emitted ions has been accomplished by means of TOF technique coupled with a 1600 electrostatic energy analyzer. The analysis of the charged species composition and kinetic energy has been performed at different laser fluences and in high vacuum conditions.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Salvatore Amoruso, Mario Armenante, Riccardo Bruzzese, M. Iavarone, Nicola Spinelli, R. Vaglio, Raffaele Velotta, and X. Wang "Excimer laser ablation of borocarbide targets", Proc. SPIE 4070, ALT '99 International Conference on Advanced Laser Technologies, (25 February 2000); https://doi.org/10.1117/12.378161
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KEYWORDS
Ions

Laser ablation

Excimer lasers

Pulsed laser operation

Thin film deposition

Electrodes

Particles

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