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24 August 2000 Electromechanical characterization of screen-printed PZT thick films
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Abstract
Thick soft and hard-PZT films have been fabricated on different geometries of Alumina substrates using a screen-printing technique. Three mechanical characterization tests were set up to determine Young's modulus of the films: dynamic, quasi-static and nanoindentation tests. A Young's modulus around 52+/- 7 Gpa was calculated. The piezoelectric coefficient d31 was also investigated and is found to be close to -33pC/N. The fabricated films showed also good performances when used in damping control.
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Vincent Walter, Patrice Le Moal, Patrick Delobelle, and Eric Joseph "Electromechanical characterization of screen-printed PZT thick films", Proc. SPIE 4073, Fifth European Conference on Smart Structures and Materials, (24 August 2000); https://doi.org/10.1117/12.396390
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