1 September 2000 Optical pressure sensor for an aeronautical application using white light interferometry
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Proceedings Volume 4075, Micro-Opto-Electro-Mechanical Systems; (2000) https://doi.org/10.1117/12.397920
Event: Symposium on Applied Photonics, 2000, Glasgow, United Kingdom
An optical pressure sensor for measuring hydraulic pressure in an aeronautical application is described. It is based on interferometry with low-coherence light coupled with single mode fibre. The design uses an anisotropically etched silicon diaphragm, electrostatically bonded to a borosilicate glass insert, mounted in a titanium body.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John Greenwood, John Greenwood, George M. Dobre, George M. Dobre, } "Optical pressure sensor for an aeronautical application using white light interferometry", Proc. SPIE 4075, Micro-Opto-Electro-Mechanical Systems, (1 September 2000); doi: 10.1117/12.397920; https://doi.org/10.1117/12.397920


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