9 May 2000 Development of an optical system for measuring the roughness of blasted surfaces
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Proceedings Volume 4077, International Conference on Sensors and Control Techniques (ICSC 2000); (2000) https://doi.org/10.1117/12.385553
Event: International Conference on Sensors and Control Techniques (ICSC2000), 2000, Wuhan, China
Abstract
An optical method for measuring surface roughness using Beckmann's theory on the scattering of electromagnetic waves is [proposed. To analyze the relation between the surface slope and the scattered light, the surface slope distribution of blasted specimens was calculated from the surface profile measured with a stylus profilometer. The light scattered from the surfaces was measured with a PCD (Plasma-Coupled Device) linear image sensor. The surface slope and surface roughness were evaluated from the measured intensity distribution. Both the distributions of the scattered light intensity and the surface slope can be approximated by a Gaussian function, suggesting that the distribution of the scattered light intensity is due to the distribution of the surface roughness slope. A computer simulation was also carried out to determine the scope of the applicability of the method.
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Zhicong Deng, Zhicong Deng, Masanori Kurita, Masanori Kurita, } "Development of an optical system for measuring the roughness of blasted surfaces", Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); doi: 10.1117/12.385553; https://doi.org/10.1117/12.385553
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