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In this paper we demonstrated a micromechanical optical modulator fabricated by surface micromechanical techniques. This modulator is optimized for a wavelength of 1.3 micrometers and intended for a fiber-to-the-home system. The modulation voltage is between 10 - 30 V, and at this modulation voltage modulator can work stably for long time in a wide frequency range.
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Huibing Mao, Jinghua Ke, Zongsheng Lai, "Micromechanical optical modulator," Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); https://doi.org/10.1117/12.385615