9 May 2000 Position and speed control sensor of microrobot
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Proceedings Volume 4077, International Conference on Sensors and Control Techniques (ICSC 2000); (2000) https://doi.org/10.1117/12.385626
Event: International Conference on Sensors and Control Techniques (ICSC2000), 2000, Wuhan, China
Abstract
In this paper, a position and speed control sensor of microrobot is developed, the method of making high-density radial grating and a new multiple frequency method are given.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hong-Lin Yu, Anguo He, Sheng Liu, Yan Chen, "Position and speed control sensor of microrobot", Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); doi: 10.1117/12.385626; https://doi.org/10.1117/12.385626
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