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9 May 2000 Position and speed control sensor of microrobot
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Proceedings Volume 4077, International Conference on Sensors and Control Techniques (ICSC 2000); (2000) https://doi.org/10.1117/12.385626
Event: International Conference on Sensors and Control Techniques (ICSC2000), 2000, Wuhan, China
Abstract
In this paper, a position and speed control sensor of microrobot is developed, the method of making high-density radial grating and a new multiple frequency method are given.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hong-Lin Yu, Anguo He, Sheng Liu, and Yan Chen "Position and speed control sensor of microrobot", Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); https://doi.org/10.1117/12.385626
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