Position and speed control sensor of microrobot

Hong-Lin Yu; Anguo He; Sheng Liu; Yan Chen

doi:10.1117/12.385626

9 May 2000 Position and speed control sensor of microrobot

Hong-Lin Yu; Anguo He; Sheng Liu; Yan Chen

Author Affiliations +

Proceedings Volume 4077, International Conference on Sensors and Control Techniques (ICSC 2000); (2000) https://doi.org/10.1117/12.385626
Event: International Conference on Sensors and Control Techniques (ICSC2000), 2000, Wuhan, China

Abstract

In this paper, a position and speed control sensor of microrobot is developed, the method of making high-density radial grating and a new multiple frequency method are given.

Citation Download Citation

Hong-Lin Yu, Hong-Lin Yu, Anguo He, Anguo He, Sheng Liu, Sheng Liu, Yan Chen, Yan Chen, } "Position and speed control sensor of microrobot", Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); doi: 10.1117/12.385626; https://doi.org/10.1117/12.385626

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