9 May 2000 Thickness and refractivity computation in ellipsometry measurement by genetic algorithm
Author Affiliations +
Proceedings Volume 4077, International Conference on Sensors and Control Techniques (ICSC 2000); (2000) https://doi.org/10.1117/12.385519
Event: International Conference on Sensors and Control Techniques (ICSC2000), 2000, Wuhan, China
Abstract
The principle of ellipsometry measurement and the foundation of the ellipsoidal equation were detailedly described, and the genetic algorithm was introduced to the calculation for refractivity and thickness of film, which ameliorates the astringency and the convergent speed. Emphatically discussed the designation of genetic operators according to the computing program flow chart.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zilong Peng, Zuoyi Li, Yu Hu, Liguo Tang, Xiaofei Yang, "Thickness and refractivity computation in ellipsometry measurement by genetic algorithm", Proc. SPIE 4077, International Conference on Sensors and Control Techniques (ICSC 2000), (9 May 2000); doi: 10.1117/12.385519; https://doi.org/10.1117/12.385519
PROCEEDINGS
4 PAGES


SHARE
Back to Top