Fabrication of diffractive optical elements using the CMOS process

Hunglin Chen; Huiwen Huang; Kaihsiang Yen; Jinhung Chio; Chingliang Dai; Chienliu Chang; Peizen Chang

doi:10.1117/12.392197

11 July 2000 Fabrication of diffractive optical elements using the CMOS process

Hunglin Chen, Huiwen Huang, Kaihsiang Yen, Jinhung Chio, Chingliang Dai, Chienliu Chang, Peizen Chang

Author Affiliations +

Proceedings Volume 4078, Optoelectronic Materials and Devices II; (2000) https://doi.org/10.1117/12.392197
Event: Photonics Taiwan, 2000, Taipei, Taiwan

Abstract

This investigation presents a novel type of DOEs fabricated by the conventional CMOS process. A simple post-CMOS process is applied to form the relief pattern, which can be used directly for its optical properties or serve as a mold for the subsequent replication. By using the CMOS process, in addition to reducing the depth, alignment, dimension, and shape errors of the pattern, the scale is minimized by the advancing microfabrication as well. The performance of arbitrary DOEs can be directly related to the diffraction efficiency of the gratings. Therefore, in this investigation, the shape of the multi-level gratings is designed and the diffraction efficiency is calculated by the rigorous vector coupled-wave analysis. The largest constraint of the CMOS process for the multilevel gratings is that the depth of each layer is different and unchangeable. However, a suitable length for each level can be determined and, in doing so, the diffraction efficiency can reach 81%.

Citation Download Citation

Hunglin Chen, Huiwen Huang, Kaihsiang Yen, Jinhung Chio, Chingliang Dai, Chienliu Chang, and Peizen Chang "Fabrication of diffractive optical elements using the CMOS process", Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000); https://doi.org/10.1117/12.392197

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
10 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Diffraction

Diffraction gratings

Metals

Diffractive optical elements

Optical design

Photomasks

Microelectronics

Show All Keywords

Keywords/Phrases

Search In:

Publication Years