11 July 2000 New multichamber evaporator for organic devices
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Proceedings Volume 4078, Optoelectronic Materials and Devices II; (2000); doi: 10.1117/12.392153
Event: Photonics Taiwan, 2000, Taipei, Taiwan
Abstract
A new four vacuum chamber evaporator for organic devices was proposed and specially designed. The chamber one is for ITO/glass pretreatment, it's have ozone treatment and plasma treatment. The chamber two is used for organic thin film evaporating. There has six sources for organic material, and three power sources can work at the same time, there is a mask storage chamber in the organic evaporation chamber, so for some material research, you can get three kind of doping density of thickness OLED at the same fabrication. The chamber three is a vacuum glove box. It's used for package. The chamber four is used for cathode evaporating, it can evaporates Mg, Ag, LfF, Ca, Al, Au.
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Qiulai Wang, Weiling Guo, Michael C. Y. Chan, ShiChuang Liu, E. Herbert Li, Charles C. Surya, "New multichamber evaporator for organic devices", Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000); doi: 10.1117/12.392153; https://doi.org/10.1117/12.392153
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KEYWORDS
Metals

Organic light emitting diodes

Organic materials

Thin films

Doping

Ozone

Plasma treatment

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