Shrinkage of spacing in fabricating sol-gel optical elements

Lin Pang; Deer Yi; Yingbai Yan; Guofan Jin; Minxian Wu

doi:10.1117/12.392164

11 July 2000 Shrinkage of spacing in fabricating sol-gel optical elements

Lin Pang, Deer Yi, Yingbai Yan, Guofan Jin, Minxian Wu

Proceedings Volume 4078, Optoelectronic Materials and Devices II; (2000) https://doi.org/10.1117/12.392164
Event: Photonics Taiwan, 2000, Taipei, Taiwan

Abstract

Real-time effect was investigated with the binary masks and contact copy method in the processing of sol-gel hybrid material. The height of the real time relief increases slowly with the increase of exposure dose, but is no relation with the variation of the spatial frequency of the mask. Moreover, the height of the real-time relief is dependent on the thickness of the film deposited on the substrate. Compared with the mask, the spacing of the exposed areas in sol-gel film shrinks, and the shrinkage rate is about 10-20%. The possible reason causing the real- time effect is discussed.

Citation Download Citation

Lin Pang, Deer Yi, Yingbai Yan, Guofan Jin, and Minxian Wu "Shrinkage of spacing in fabricating sol-gel optical elements", Proc. SPIE 4078, Optoelectronic Materials and Devices II, (11 July 2000); https://doi.org/10.1117/12.392164

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