30 June 2000 High-contrast SXGA silicon light valves for high-definition video projectors
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We have developed a highly integrated liquid-crystal-on- silicon light valve for three-panel color projector. The silicon panel was designed and fabricated by a 0.35 micrometers , 3-metal and dual-voltage CMOS process with a spatial resolution of 1280 X 1024 pixels. The pixel pitch was 12 micrometers , the fill factor was 90% and the display area was 0.77' in diagonal. Eight-bit digital data drivers and gamma- correction circuitry were integrated into the silicon panel for true gray scale and full color representation. The display panel was assembled with a mixed twisted nematic and birefringence liquid crystal cell for high contrast at CMOS compatible voltage. Contrast ratio was typically 200:1 at 5.5 Vrms. In addition, silicon surface layers, liquid crystal materials, pixel structures and driving schemes were carefully optimized for the minimization of visual flicker. Flicker ratio of less than 3% was achieved at 60 Hz frame rate. The optical sub-system utilized a trichroic prism assembly for both color separation and recombination. With this trichroic prism assembly incorporating three silicon light valves, a compact and high-contrast SXGA video projector was demonstrated.
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Ho-Chi Huang, Ho-Chi Huang, Po-Wing Cheng, Po-Wing Cheng, HoiSing Kwok, HoiSing Kwok, } "High-contrast SXGA silicon light valves for high-definition video projectors", Proc. SPIE 4079, Display Technologies III, (30 June 2000); doi: 10.1117/12.389400; https://doi.org/10.1117/12.389400

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