Study of 5-mask TFT array process with low-cost high-yield high-performance characteristics

Jr-Hong Chen; Ting-Hui Huang; I-Min Lu; Pi-Fu Chen; Dou-I Chen

doi:10.1117/12.389408

30 June 2000 Study of 5-mask TFT array process with low-cost high-yield high-performance characteristics

Jr-Hong Chen, Ting-Hui Huang, I-Min Lu, Pi-Fu Chen, Dou-I Chen

Proceedings Volume 4079, Display Technologies III; (2000) https://doi.org/10.1117/12.389408
Event: Photonics Taiwan, 2000, Taipei, Taiwan

Abstract

Three types of 5-mask TFT array process have been compared and analyzed their characteristics including TFT performance, process window, etc. Results showing here indicate that a 5-mask TFT manufacturing process can be optimized with low cost, high production yield and high performance. These properties let the reduced mask TFT array process reveal a much higher potential in mass production.

Citation Download Citation

Jr-Hong Chen, Ting-Hui Huang, I-Min Lu, Pi-Fu Chen, and Dou-I Chen "Study of 5-mask TFT array process with low-cost high-yield high-performance characteristics", Proc. SPIE 4079, Display Technologies III, (30 June 2000); https://doi.org/10.1117/12.389408

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