Paper
7 February 2001 Further advances in electron beam recording
Giles Cartwright, Gerald Reynolds, Chris Baylis, Adrian Pearce, Stephen Swann, Colin Dix, Nick Ogilvie
Author Affiliations +
Proceedings Volume 4085, Fifth International Symposium on Optical Storage (ISOS 2000); (2001) https://doi.org/10.1117/12.416839
Event: Fifth International Symposium on Optical Storage (IS0S 2000), 2000, Shanghai, China
Abstract
The development of a production Electron Beam Recorder designed for making masters for optical discs of up to 50 gigabytes capacity is discussed. A low cost upgrade path for mastering discs of capacities of 100 GB or higher is shown and some recent results of optical discs ranging in capacity from 4.7 GB to 45 GB are presented.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Giles Cartwright, Gerald Reynolds, Chris Baylis, Adrian Pearce, Stephen Swann, Colin Dix, and Nick Ogilvie "Further advances in electron beam recording", Proc. SPIE 4085, Fifth International Symposium on Optical Storage (ISOS 2000), (7 February 2001); https://doi.org/10.1117/12.416839
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Electron beams

Atomic force microscopy

Control systems

Optical discs

Photoresist processing

Semiconducting wafers

Silicon

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