Characterization of optical storage media films by time-of-flight-energy elastic recoil detection analysis

Yanwen Zhang; Goran Possnert; Lars Jonsson; Thomas Winzell; Harry J. Whitlow

doi:10.1117/12.408426

29 November 2000 Characterization of optical storage media films by time-of-flight-energy elastic recoil detection analysis

Yanwen Zhang, Goran Possnert, Lars Jonsson, Thomas Winzell, Harry J. Whitlow

Author Affiliations +

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408426
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

The challenge of meeting the ever increasing demands for low-cost information storage media with greater information storage density and rapid access has prompted development of sophisticated optical technologies, e.g. CD (Compact Disc) and DVD (Digital Video Disc) in Read Only (ROM), Recordable (R), Re-writable (RW) and Random Access Memory (RAM). Here the suitability of Time of Flight-Energy Elastic Recoil Detection Analysis (ToF-E ERDA) to characterize optical storage media has been investigated. High-energy heavy ions (48 MeV ⁸¹Br⁸⁺ and 60 MeV ¹²⁷I¹⁰⁺) from an accelerator were used to analyze CD-ROM, CD-R and CD-RW structures. Simultaneous characterization of H, C, O, Al, P, Co, Cr, Ge, Sb/Te could be made. The results demonstrate the unique power of the technique for characterizing the structure and depth profile of the optical multi-layers as well as the ingress and influence of foreign species.

Citation Download Citation

Yanwen Zhang, Goran Possnert, Lars Jonsson, Thomas Winzell, and Harry J. Whitlow "Characterization of optical storage media films by time-of-flight-energy elastic recoil detection analysis", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408426

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