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29 November 2000 Effects of Pt/RuO2 hybrid bottom electrodes on the electrical properties of BST thin films
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Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408340
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China
Abstract
The effects of the different bottom electrodes on the electrical properties of BST thin films have been investigated. The electrical properties of BST films spin- coated on Pt/RuO2 hybrid electrodes were improved compared to the films on RuO2 electrodes. The dielectric constant and dissipation factor of the 0.1 micrometers BST thin films on Pt/RuO2 bottom electrodes were 582 and 0.035 at zero bias voltage. The leakage current density of this film was 7.2 X 10-8 A/cm2 at 1.5 V which was about one order of magnitude lower than leakage current density (5.2 X 10-7 A/cm2 at 1.5 V) of BST capacitor with RuO2 films.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tianjin Zhang and Hong Ni "Effects of Pt/RuO2 hybrid bottom electrodes on the electrical properties of BST thin films", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408340
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