29 November 2000 Study of thin film gas sensors using optical methods
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Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408488
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China
Abstract
The optical sensitive characteristic of SnO2 and V2O5 thin films to the gas SO2 was investigated with photometric and ellipsometric methods. It is found that thin films of the Pd-doped SnO2 and pure-V2O5 have good optical sensitive characteristics to SO2 in the visible range, and the Zr-doped SnO2 film in the near-infrared area. The results show that the change of the optical characteristic is directly related to the variation of optical gap and the concentration of free carrier in thin films.
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Zhaosheng Tang, Zhaosheng Tang, Zhengxiu Fan, Zhengxiu Fan, Jian-Da Shao, Jian-Da Shao, } "Study of thin film gas sensors using optical methods", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408488; https://doi.org/10.1117/12.408488
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