29 November 2000 Synthesis, dielectric characteristic, and microstructure of acetate-based (Ba,Sr)TiO3 thin films
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Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408338
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China
Abstract
A modified sol-gel process with acetate based precursor solutions for Sr-doped barium titanate thin films is presented. A four-step heating procedure was employed to prepare the Ba0.8Sr0.2TiO3 thin films. The thermal decomposition and crystallization temperatures of the precursors were determined by means of FTIR, TGA/DTA, and XRD measurements. The nonlinear C-V characteristics are due to strong depletion that can not originate from the BST/electrode interface, but must come internally from the BST films.
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Huyong Tian, Weigen Luo, Xinghua Pu, Pingsun Qiu, Xiyun He, Aili Ding, "Synthesis, dielectric characteristic, and microstructure of acetate-based (Ba,Sr)TiO3 thin films", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408338; https://doi.org/10.1117/12.408338
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